Surface hydrogen densities of variously treated CVD diamond surfaces

Hydrogen, deuterium and oxygen densities on diamond 100.surfaces have been investigated by elastic recoil detection analysis ERDA.and Rutherford backscattering spectrometry RBS.. The 100.surfaces were homoepitaxially grown by chemical vapor deposition CVD., and surface reactions were enhanced by radical-beam treatments. Atomic force microscopy AFM.was also used for observation of surface topography. AFM images indicate the homoepitaxially grown diamond 100.surfaces were almost atomically flat surfaces. Hydrogen density of a hydrogen-radical-beam-treated diamond 100.surface was about 3=1015 atomsrcm2 and was not varied by oxidation with oxygen radical beam. The hydrogen density is about twice as large as that of the ideal hydrogen-terminated 2=1 surface. Oxygen density of the oxygen-radicalbeam- treated surface was about F1=1015 atomsrcm2. Either hydrogen-radical-beam or deuterium-radical-beam treatments decreased the hydrogen density. The variations of hydrogen and oxygen densities were discussed in terms of surface structures and roughness. q1999 Elsevier Science B.V. All rights reserved.