Microstructure and X-ray analysis on LaCaMnO thin film

La2r3Ca1r3MnO3 thin films in the thickness range between 40–500 nm, have been deposited by an optimised pulsed laser deposition process on SrTiO3 STO.single crystal substrates. The surface morphology of the thin films was examined by AFM and SEM. X-ray investigations were applied to study the lattice parameters. XRD pole figures show an epitaxial growth of manganite thin films on 100. STO substrate. According to X-ray diffraction pattern, we could derive the dependence of the lattice parameters within the thickness of the film. It is shown that Rietveld refinement of XRD pattern is essential to assess the structure of the manganite phase. Lattice parameters are refined and distances and bond angels were determined. A correlation between structure, transport properties and thickness are discussed. q1999 Elsevier Science B.V. All rights reserved.