Zirconium oxide films deposited by reactive pulsed laser ablation

Laser ablation, by Kr–F and Nd–YAG lasers, of solid targets of ZrO2 has been studied in vacuum and in oxygen atmosphere. The plume expansion and composition have been characterized by mass spectrometric and optical techniques. Cluster ions Zr O and neutral species, formed in the plasma, have been identified by mass spectrometry. Plume velocity has x y been measured by a ICCD camera. Buffer gas effects and geometrical parameters have been optimized to improve the quality of the deposited thin films. q1999 Published by Elsevier Science B.V. All rights reserved.