Characterization of modifications observed on nitrides after an UV laser exposure

Surface modifications on aluminium nitride AlN.induced by an UV laser treatment have been investigated using advanced surface techniques scanning electronic microscopy SEM., energy dispersive spectroscopy EDS., Auger electron spectroscopy AES., X-ray diffraction XRD.. . ..and electrical resistance measurements. AES and XRD analysis have revealed the presence of an Al metallic film upon the laser irradiated zone while SEM and EDS analysis have shown the formation of a halo rich in oxygen around it. Electrical measurements have confirmed the metallic nature of the laser-exposed surface, where a conductive path can be drawn upon the insulator AlN ceramic. Irradiation parameters energy density and number of pulses. have been determined regarding to the obtaining of a metallic thin film by this one-step process. q1999 Elsevier Science B.V. All rights reserved