Epitaxial growth of dielectric SrTiO thin films by pulsed laser 3 deposition

The dielectric perovskite-type oxide SrTiO3 thin films have been epitaxially grown on 001.LaAlO3 single crystal substrates on the basis of optimization of pulsed laser deposition PLD.process. Several analytical techniques, such as X-ray diffraction u–2u scan and f scan, AFM, XPS were used to characterize the epitaxial property, growth mechanism and surface chemical composition of these SrTiO3 thin films. q1999 Elsevier Science B.V. All rights reserved.