Semiconductor acousto-electric potential detection using a force microscope

Acousto-electric force microscopy AEFM., developed as a technique for high-resolution mapping of carrier character- istics in solids is described. This technique is based on an acousto-electric voltage AEV.detection scheme where AEV pulses are obtained from the cantilever deflection caused by the electrostatic force acting between the cantilever tip and the sample surface. AEFM appears to be feasible, but an improved AEV detection scheme is required. q1999 Elsevier Science B.V. All rights reserved.