Abstract :
In this study, we investigate the addition of oxygen functionalities to parylene AF-4 using X-ray photoelectron
spectroscopy XPS.. Subsequent reactions with trimethylaluminum TMA.were also studied by XPS. Samples were exposed
to water vapor that was passed over a heated W filament, and comparison is made with similarly exposed polystyrene.
Oxygen incorporation occurred in both polymers and was substantially greater in polystyrene. Defluorination occurred in the
parylene sample, and X-ray photoelectron spectra indicate that the oxygen is chemically bound to the polymer surface. TMA
was dosed at room temperature onto the parylene samples, and prior modification of the AF-4 surface resulted in enhanced
reactivity toward TMA. Atomic force microscopy AFM.is used to characterize the surfaces and demonstrates that no
significant surface roughness occurred due to the modification process. q1999 Elsevier Science B.V. All rights reserved
