Atomic force microscope study of carbon thin films prepared by pulsed laser deposition

Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition PLD.using different laser wavelengths ls193 nm, 532 nm, 1064 nm.and substrate temperatures from room temperature to 5008C.. The morphology of the film surface was observed using an atomic force microscope AFM.and a scanning electron microscope SEM.. Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1–10 mm ejected from the targets due to surface being melted. q1999 Elsevier Science B.V. All rights reserved