Title of article :
Application of the field emitter array to the vacuum measurements
Author/Authors :
N. Ogiwara، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Pages :
5
From page :
234
To page :
238
Abstract :
We have successfully used the Spindt field emitter array FEA.in the pressure measurements in ultrahigh vacuum UHV. and extremely high vacuum XHV.. For applying the FEA to pressure measurements, we have made evaluation tests, focusing on gas exposure and outgassing characteristics. The cold cathode hardly influenced the vacuum conditions, compared to a hot-filament cathode. q1999 Elsevier Science B.V. All rights reserved
Keywords :
Field emitter array , Vacuum , Pressure measurements
Journal title :
Applied Surface Science
Serial Year :
1999
Journal title :
Applied Surface Science
Record number :
995603
Link To Document :
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