• Title of article

    Synthesis of crystalline C N by MPCVD

  • Author/Authors

    D.X Shi، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1999
  • Pages
    6
  • From page
    50
  • To page
    55
  • Abstract
    In this study, carbon nitride thin films are synthesized on Si and Pt substrates by microwave plasma chemical vapor deposition MPCVD.. The major part of the films is composed of a-C3N4 and b-C3N4. XPS and FT-IR spectra strongly support the existence of C–N covalent bonds in C3N4. Raman spectra also support the existence of b-C3N4. The carbon nitride films on Pt substrates have a high bulk modulus of 349 GPa. q1999 Published by Elsevier Science B.V. All rights reserved.
  • Keywords
    Carbon nitride , B-C3N4 , CN , Thin film , hardness , MPCVD
  • Journal title
    Applied Surface Science
  • Serial Year
    1999
  • Journal title
    Applied Surface Science
  • Record number

    995666