Kinetic effects on the size homogeneity of Stranski–Krastanow islands

In this study we present results concerning the size height.homogeneity of self-assembled quantum dots grown in the Stranski–Krastanow growth mode for different deposition conditions. 3.5 ML InP was deposited on a GaP-stabilized GaAs substrate by metal organic vapor phase epitaxy for varying temperatures, 580–6408C, and varying deposition rates, 0.5–3.5 MLrs. The average height decreases for increasing deposition rate and decreasing temperature. The width of the height distribution decreases with decreasing temperature and shows a non-monotonic behaviour with a minimum as a function of the deposition rate. q1999 Elsevier Science B.V. All rights reserved.