Defect production by the TEM beam—the first application of the positron microprobe

In cooperation with the ZEISSrLEO GmbH a positron microprobe has been constructed. Additionally, a conventional scanning electron microscope SEM.is integrated in the setup. Measurements on radiation defects in Mo and Cu samples, made by 1 MeV electron irradiation in a transmission electron microscope TEM., are presented. The results coincide with the expected damage profiles. Because of the small beam diameter—the great advantage of the positron microprobe—only very small areas about 20 to 30 mm in diameter.have to be damaged. Therefore, the irradiation times required to produce samples for investigations of radiation defects caused by electrons are reduced enormously. This means that much higher defect concentrations can be produced in an acceptable time and the positron measurements can cover a wider range of defect concentrations. q1999 Elsevier Science B.V. All rights reserved