Secondary ion mass spectrometry and optical characterization of Ti:LiNbO optical waveguides

Secondary ion mass spectrometry SIMS.and m-lines spectroscopy have been applied to study Ti:LiNbO3 slab optical waveguides with high titanium surface concentration. By combining the two techniques, a saturation in the dependence of the refractive index change on the dopant concentration has been found. By the use of SIMS in image mode, the lateral diffusion of titanium in Ti:LiNbO3 channel waveguides has been observed and analyzed. q1999 Elsevier Science B.V. All rights reserved