Laser direct writing of palladium on polyimide surfaces from solution

Conductive palladium Pd. patterns were generated by laser-induced chemical liquid-phase deposition LCLD.on polyimide PI.substrates using a continuous Arq laser beam. The deposition process was executed from the amine complex solution of Pd2q ions. Dependence of the characteristics of the laser direct written patterns on scanning speed of the laser beam, number of scans and laser power was examined. Deposits were characterised by Field Emission Scanning Electron Microscope FESEM., Energy Dispersive Spectrometry EDS., and profilometric measurements. The resistance of the patterns was also measured. It was found that good quality lines — narrow, homogeneous, and with high conductivity and adhesion — were achieved under optimized conditions. q1999 Elsevier Science B.V. All rights reserved