Characterization of diamond-like carbon films before and after pulsed laser irradiation

In this work, we correlate the structural properties of DLC films with their photoelectric properties. DLC layers are deposited on silicon wafers by RF plasma-assisted chemical vapor deposition RF PACVD.. The films are irradiated with picosecond Nd3q-YAG laser pulses at different wavelengths 213 and 266 nm.and energies few mJ to mJ.. Photoelectric sensitivity values are reported and compared with those of metals. The DLC coatings are characterized before and after irradiation by IR spectroscopy, micro-Raman spectroscopy and ellipsometry in order to observe laser-induced structural modifications of the layers. In situ measurements of work function variations at the surface induced by laser pulses are also reported. q2000 Elsevier Science B.V. All rights reserved