Synchrotron radiation photoelectron spectroscopy study of ITO surface

Synchrotron radiation photoelectron spectroscopy SRPES.has been applied to surface analysis of indium tin oxide ITO.thin films. Several different components of In and Sn were observed at the clean ITO surface. By comparing the chemical compositions of the film before and after vacuum annealing, the contents of In2O3yx and Sn3O4 were found to be the major factors influencing the electrical conductivity and optical transparency of the film. q2000 Elsevier Science B.V. All rights reserved.