Characterization of low dielectric constant amorphous carbon nitride films

Amorphous carbon nitride a-CN.films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency dependence of capacitance, Raman and photoluminescence spectra. q2000 Elsevier Science B.V. All rights reserved.