• Title of article

    Characterization of low dielectric constant amorphous carbon nitride films

  • Author/Authors

    M. Aono)، نويسنده , , S. Nitta، نويسنده , , T. Katsuno، نويسنده , , T. ITOH، نويسنده , , S. Nonomura، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2000
  • Pages
    4
  • From page
    341
  • To page
    344
  • Abstract
    Amorphous carbon nitride a-CN.films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency dependence of capacitance, Raman and photoluminescence spectra. q2000 Elsevier Science B.V. All rights reserved.
  • Keywords
    amorphous , Carbon-nitride film , Raman spectra , aluminum , Low dielectric constant , Reaction with metal
  • Journal title
    Applied Surface Science
  • Serial Year
    2000
  • Journal title
    Applied Surface Science
  • Record number

    996192

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=996192