Comparison of the optical properties of ZnO thin ®lms grown on various substrates by pulsed laser deposition

Various substrates were compared for the investigation of the optical properties of ZnO thin ®lms. ZnO thin ®lms have been deposited on (1 0 0) p-type silicon substrates and (0 0 1) sapphire substrates by pulsed laser deposition (PLD) technique using a Nd:YAG laser with the wavelength of 355 nm. Oxygen was used as ambient gas. Substrate temperatures were varied in the range of 200±6008C at a ®xed oxygen gas pressure of 350 mTorr. We have investigated substrate effect on the optical and structural properties of ZnO thin ®lms using X-ray diffraction (XRD) and photoluminescence (PL). # 2000 Elsevier Science B.V. All rights reserved