Properties of amorphous ternary alloy ®lms a-SixCyGez:H prepared by magnetron co-sputtering

Amorphous SixCyGez:H (x ‡ y ‡ z ˆ 1; z 0:1) have been deposited by reactive sputtering of Si±Ge composite target in argon±methane gas mixtures. The effects of the addition of Ge and the methane partial pressure P on the ®lm properties were investigated. At high P, the addition of Ge could improve the reduction of the photoconductivity with increasing P observed in a-SixCy:H (z ˆ 0). # 2001 Elsevier Science B.V. All rights reserved