The transport mechanism of YSZ thin ®lms prepared by MOCVD

The effect of microstructure and substrate on the electrical conductivity of yttria stabilized zirconia ®lm (YSZ), prepared by metal±organic chemical vapor deposition (MOCVD), was investigated by complex impedance analysis. The electrical conductivity of the thin ®lms with columnar structure was controlled by the oxygen ion conduction across the columnar grain boundary. The YSZ thin ®lm deposited on Al2O3 (1 0 2), MgO (1 0 0) and SiO2 with columnar grains exhibit the electrical response of polycrystalline ceramic specimen. The dependence of activation energy and impedance diagram on substrate is increased according to the mismatch of thermal expansion coef®cient between ®lm and substrate. # 2001 Elsevier Science B.V. All rights reserved