Atmospheric pressure chemical vapour deposition of selenium ®lms by KrF laser photolysis of dimethyl selenium

KrF laser-induced photolysis of gaseous dimethyl selenium in excess of helium is controlled by cleavage of both Se±C bonds and affords ethane as a very dominant gaseous product together with elemental selenium. The photolysis mechanism being different from that of thermolysis shows potential for chemical vapour deposition of selenium ®lms not contaminated with carbon impurities. # 2001 Elsevier Science B.V. All rights reserved.