The estimation of the average dimensions of deposited clusters from XPS emission intensity ratios

We propose a method for the calculation of the average size of spherical clusters on a surface, using XPS emission intensity ratios. The method is applied to the case of Cu clusters on Dow Cyclotene 3022, a low permittivity polymer. It gives reasonable particle sizes and number densities, and shows that the clusters coalesce on annealing. TEM photomicrographs con®rm the size and sphericity of the clusters formed. # 2001 Published by Elsevier Science B.V.