Author/Authors :
Hirofumi Hidai*، نويسنده , , Hitoshi Tokura، نويسنده ,
Abstract :
In this paper, a new, simple, high-speed method of selective metal deposition on glass substrates is proposed. The method is
as follows: metal powder is placed on a glass substrate, then an argon ion laser is irradiated through the glass from the other
side, consequently the powders are deposited on the glass substrates. Soda glass, Pyrex glass and silica glass were used as
substrates, because they are popular materials and their thermal properties were varied. Aluminum and copper powders, with
grain sizes of 7.0 and 4.6 mm, respectively, were chosen.
Glass substrates and metal powder were placed in a chamber to enable control of the atmosphere, the chamber was ®xed on
an electronically controlled X±Y±Z stage. Aluminum and copper can be deposited on all three types of glass. Aluminum
deposited on the soda glass were 80±800 mm in width and 10±120 mm in height. The deposited aluminum and copper had high
conductivity and resistances of 0.017±0.64 and 0.0014±0.2 O/mm (1 mm long), respectively. The adhesion between deposited
copper and soda glass was stronger than 3 MPa. The interface between the glass substrate and deposited metals have a
complicated shape, but the border is distinct and aluminum was not diffused, as determined by observation of the cross section
and etching the deposited metal. # 2001 Elsevier Science B.V. All rights reserved.
Keywords :
Argon ion laser , Metal deposition , GLASS , copper , aluminum