Title of article :
Rheed in-plane rocking curve analysis of biaxially-textured polycrystalline MgO films on amorphous substrates grown by ion beam-assisted deposition
Author/Authors :
R.T Brewer، نويسنده , , J.W Hartman، نويسنده , , J.R Groves، نويسنده , , P.N Arendt، نويسنده , , P.C Yashar، نويسنده , , H.A Atwater، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
6
From page :
691
To page :
696
Abstract :
We have developed a method for biaxial texture determination in polycrystalline films using reflection high energy electron diffraction (RHEED) in-plane rocking curves. Experimental RHEED in-plane rocking curves were taken at 25 keV and 2.7° incidence angle from 11 nm thick, nominally [1 0 0]-textured MgO films grown on amorphous Si3N4 by ion beam-assisted deposition (IBAD). The experimental RHEED in-plane rocking curves were analyzed by comparing them with RHEED in-plane rocking curves calculated using a kinematical simulation. The model enables a quantitative correlation between biaxial texture and RHEED in-plane rocking curve measurements. RHEED results are compared to X-ray rocking curve film analysis.
Keywords :
RHEED , In-plane rocking curve , MGO , Texture , Ion beam-assisted deposition
Journal title :
Applied Surface Science
Serial Year :
2001
Journal title :
Applied Surface Science
Record number :
997112
Link To Document :
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