Influence of deep level impurities on the conductance technique for the determination of series resistance of a Schottky contact

The well-known conductance technique for the determination of series resistance of a Schottky contact has been re-evaluated in the light of a bulk defect model and considering the recombination current. The analysis reveals the limitation of the conventional evaluation scheme. The estimated values of the series resistance using such scheme vary considerably as the energy level of the defect is varied. In order to overcome this limitation, a modified conductance technique has been proposed with which the series resistance can be estimated accurately and has been found almost independent of the values of the defect energy level.