Database in low temperature plasma modeling

This article is composed of recommended sets of electron collision cross-sections and reaction cross-sections of excited species assessed by a swam method and of information on transport coefficients and reaction rates (cross-sections) of ions, which are needed in low temperature plasma modeling. These data have been piled up by the Investigation Committee on “Discharge Plasma Electron Collision Cross-sections”, IEE Japan, and the author’s laboratory. The gases taken for the assessment in this work are rare gases, Hg, N2, O2, CO2, CF4, CH4, GeH4, SiH4, SF6, C2H6, Si2H6, c-C4F8 and CCl2F2.