Gas-phase mechanisms in the growth of ZrCyN1−y thin films by pulsed reactive crossed-beam laser ablation

Superhard zirconium carbonitride films have been grown via pulsed reactive crossed-beam laser ablation (PRCLA) using zirconium metal and a nitrogen- and carbon-containing gas pulse mixture. The control of stoichiometry was much simplified by using the thermally stable gas-phase species N2 and CH4. The gas-phase processes are investigated using quadrupole mass spectroscopy and optical emission spectroscopy. The excitation of the ablation plume depends intimately on the collision partner of the gas pulse, in particular on its density of states and the probability of energy transfer to internal degrees of freedom.