Title of article
Deposition of Er:YAG (YAP) layers by subpicosecond and nanosecond KrF excimer laser ablation
Author/Authors
Miroslav Jelinek، نويسنده , , Argyro Klini، نويسنده , , Christos Grivas، نويسنده , , J?n Lan?ok، نويسنده , , V?clav Studni?ka، نويسنده , , Jind?ich Chval، نويسنده , , Anna Mackov?، نويسنده , , Costas Fotakis، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
5
From page
416
To page
420
Abstract
Thin films of Er:YAG and Er:YAP were deposited by subpicosecond (450 fs) and nanosecond (20 ns) KrF laser (λ=248 nm) on YAG, YAP, fused silica, silicon and sapphire substrates. Laser spot size, energy density, substrate temperature and deposition ambient (vacuum and oxygen) were varied. Comparison of growth rate, morphology, composition, crystallinity and adhesion of the films grown by subpicosecond and nanosecond deposition is presented.
Keywords
Er:YAG , Er:YAP , Pulsed laser deposition , Subpicosecond laser , Thin films
Journal title
Applied Surface Science
Serial Year
2002
Journal title
Applied Surface Science
Record number
998230
Link To Document