Investigation of the cluster ion formation process for inorganic compounds in static SIMS

Binary and ternary oxides including iron, chromium, titanium and lead were investigated by static SIMS. The numerous metal-oxygen ions obtained in both ion detection mode after 15 keV 69Ga+ bombardment have been analyzed by time-of-flight mass spectrometry. The obtained fingerprints allow the unambiguous identification of the studied oxides. The comparison between the results obtained in the study of FeCr2O4 and PbTiO3 ternary oxides and the FeO–Cr2O3 and PbO–TiO2 stoichiometric mixtures allow us to consider that recombination in gas phase did not occur between the sputtered species. The direct ejection of species followed by uni-molecular dissociation may well account for the obtained results.