Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50° to normal

The deterioration of depth resolution with depth was investigated by profiling a B delta-layer resolution standard, with Cs+ at glancing impact angles. The deterioration was eliminated for 1 keV Cs+ at 60° using a trapezoidal scan correction, available on the ATOMIKA 4500. The SIMS responses were partially deconvolved by fitting a sum of analytical response functions. A depth scale was assigned using a two point fit to XTEM data. The post-calibration peak positions agree with the XTEM to within 0.34 nm.