Title of article :
Transient processes and structural transformations in SixGe1−x layers during oxygen implantation and sputtering
Author/Authors :
D Krüger، نويسنده , , A.A Efremov، نويسنده , , J Murota، نويسنده , , B Tillack، نويسنده , , R. Kurps، نويسنده , , G.Ph Romanova، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Pages :
5
From page :
285
To page :
289
Abstract :
We analyze transient processes during oxygen bombardment and sputtering of epitaxial SixGe1−x layers with different compositions (0
Keywords :
SiGe , Oxygen , Sputtering , SIMS
Journal title :
Applied Surface Science
Serial Year :
2003
Journal title :
Applied Surface Science
Record number :
998440
Link To Document :
