SIMION modeling of ion optical effects in Cameca ion microanalyzers: simulation of ion transmission losses

A 3D ion optical simulation of the Cameca IMS 3f/4f has been built using the SIMION modeling program and has been combined with a Monte Carlo method to generate initial secondary ion energy and angular distributions. The potential of this modeling system has been demonstrated by evaluating ion transmission losses in the IMS 3f/4f. # 2004 Elsevier B.V. All rights reserved.