Title of article :
Low temperature deposition of crystalline chromium
phosphide films using dual-source atmospheric
pressure chemical vapour deposition
Author/Authors :
Christopher S. Blackman، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Abstract :
Thin films of crystalline chromium phosphide (CrP) have been produced from the dual-source atmospheric pressure CVD
reaction of chromium hexacarbonyl and cyclohexylphosphine. Analysis of the films using EDAX, SEM, glancing angle XRD
and XPS is presented.
# 2004 Elsevier B.V. All rights reserved.
Keywords :
Thin film , CVD , Chromium phosphide , Hexacarbonyl
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
