Title of article
Low temperature deposition of crystalline chromium phosphide films using dual-source atmospheric pressure chemical vapour deposition
Author/Authors
Christopher S. Blackman، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
5
From page
24
To page
28
Abstract
Thin films of crystalline chromium phosphide (CrP) have been produced from the dual-source atmospheric pressure CVD
reaction of chromium hexacarbonyl and cyclohexylphosphine. Analysis of the films using EDAX, SEM, glancing angle XRD
and XPS is presented.
# 2004 Elsevier B.V. All rights reserved.
Keywords
Thin film , CVD , Chromium phosphide , Hexacarbonyl
Journal title
Applied Surface Science
Serial Year
2004
Journal title
Applied Surface Science
Record number
998640
Link To Document