Femtosecond laser ablation of diamond-like carbon films

Diamond-like carbon (DLC) coatings were deposited on Si substrates using a hot filament diode discharge and they were irradiated with ultrashort laser pulses (800 nm, 150 fs, <4 J/cm2). The laser-treated films were examined using optical microscopy, Raman spectroscopy, SEM, AFM and white-light interferometery. Damage threshold of 0.16 J/cm2 and ablation rates below 110 nm/pulse were determined. Changes in the structure of the laser-irradiated films were showed by means of Raman investigations. The laser-treated samples were etched and the depths of modified material layers were determined. Ablation experiments with longer laser pulses (1064 nm, 100 ns, <3 J/cm2) were also performed and the irradiated DLC films were afterwards analyzed using the same procedures. Dissimilarities in the structure changes induced by fs-and ns-laser irradiation were observed and comments are given. # 2003 Elsevier B.V. All rights reserved.