Dual-source chemical vapour deposition of strontium and zirconium b-diketonates for strontium zirconate perovskite films

Strontium zirconate perovskite thin films were deposited on Si(1 0 0) substrates by metal organic chemical vapour deposition (MOCVD) in a cold wall reactor using direct injection process of two b-diketonates precursors. Oxide growth was observed over a temperature ranging from 700 to 1000 8C and various metal Sr/Zr ratios in the solution. Using peculiar experimental conditions, an orthorhombic strontium zirconate (SrZrO3 (o)) phase is obtained. The results on the films are discussed in relation with the bulk ZrO2–SrO pseudo binary equilibrium phase diagram existing on this compound. # 2003 Elsevier B.V. All rights reserved