Abstract :
Synthesis and characterization tools designed for combinatorial materials science are described. The effectiveness of these
tools is demonstrated through a well-known phase diagram study. An application of the technology to industrial product
development is also described.
# 2003 Published by Elsevier B.V.
Keywords :
Ion-beam sputtering , Combinatorial material science , Scanning micro-beam , X-ray diffraction , fluorescence , Crystal structural , Composition mapping , Scanning evanescent microwave probe , Electrical impedance mapping , Continuousphase diagram mapping , Tunable dielectrics , Tunable dielectric filters , Molecular beam epitaxy
