Re-discovering surface mass spectrometry: chemical mapping from micro to macro

New developments in electronics, devices, micro-encapsulation, and other areas demand the ability to acquire molecularlyspecific information from smaller and smaller features. ToF-SIMS provides molecularly-specific mass spectral data, but sufficient high-mass signal has historically been difficult to obtain from organic/polymeric surfaces in the point-mapping mode of operation. Use of chemometric data reduction methods and the development of heavier primary ion sources enhance and extend the chemical information in the mapping data. Large-area chemical mapping via sample stage rastering has also opened up new applications. This capability allows single-experiment mapping of large or multiple features, provides information on surface uniformity over end-use-relevant areas, and offers potential for combinatorial and other screening applications. Examples of these applications are presented. # 2004 Elsevier B.V. All rights reserved