Title of article :
Increased surface roughness by oxygen plasma treatment of graphite/polymer composite
Author/Authors :
U. Cvelbar، نويسنده , , S. Pejovnik، نويسنده , , M. Mozetiè، نويسنده , , A. Zalar، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Pages :
7
From page :
255
To page :
261
Abstract :
The technology of selective plasma etching was applied to increase the surface roughness of graphite/polymer composite. Etching was performed with a low pressure weakly ionised oxygen plasma created with a RF generator of the output power of 200 W and frequency of 27.12 MHz. The density of charged particles, density of neutral oxygen atoms and the electron temperature was about 1×1016 m−3, 4×1021 m−3, and 5 eV, respectively. The effects of plasma treatment were observed by scanning electron microscope (SEM), electron microprobe (EMPA) and Talysurf. It was found that the surface roughness was increased by approximately 15 times, from a virgin sample at the roughness of Ra=0.27 μm to a very rough surface with Ra=4 μm. The roughness increased with increasing plasma exposure time. The EMPA results showed that the amount of sulphur in the surface layer decreased with increasing etching time indicating that PPS polymer was the material etched preferentially.
Keywords :
Oxygen , Graphite , Polymer , Composite , Plasma etching
Journal title :
Applied Surface Science
Serial Year :
2003
Journal title :
Applied Surface Science
Record number :
999921
Link To Document :
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