Title :
Development of Nanoelectromechanical Resonators for RFIC Applications
Author :
Sanjay Raman استاد راهنما , Stephane Evoy استاد مشاور , Guo-Quan Lu استاد مشاور , Louis Guido استاد مشاور
University :
Virginia Polytechnic Institute and state University
Major :
Master of Engineering )Electrical and Computer Engineering(
Keyword :
RFIC , NANOTECHNOLOGY , E-Beam Lithography , SOI Processing , Nanoelectromechanical , Filter , Integrated Circuit
