Title :
The Chemistry and Surface Microstructure of Si-Based Substrates and their Effect on the Evolution of the Microstructures of III-Nitride Films Grown via Metalorganic Vapor Phase Epitaxy
Author :
Robert F. Davis استاد راهنما , John Muth استاد مشاور , Zlatko Sitar استاد مشاور , Mark Johnson استاد مشاور
University :
Raleigh North carolina state university
Major :
PhD )Materials Science and Engineering(
Keyword :
hydrogen etching , cantilever epitaxy , lateral overgrowth , heteroepitaxy , threading dislocations , MOVPE , GaN
