DocumentCode :
1083
Title :
Design and Fabrication of Electromagnetic Micro-Relays Using the UV-LIGA Technique
Author :
Elizabeth J. Podlaha-Murphy استاد مشاور , Marcio S. de Queiroz استاد مشاور , Wanjun Wang استاد راهنما
University :
Lovisiana State University
Grade :
دكتري
Major :
Doctor of Philosophy )Ph.D.( )Engineering Science )Interdepartmental Program((
Number of pages :
0
Publish Date :
2004
Keyword :
MEMS , Fracture mechanics , electromagnetic relay , SU-8 , power relay , UV-LIGA
Note :
01
Language :
انگليسي
Link To Document :
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