DocumentCode
1083
Title
Design and Fabrication of Electromagnetic Micro-Relays Using the UV-LIGA Technique
Author
Elizabeth J. Podlaha-Murphy استاد مشاور , Marcio S. de Queiroz استاد مشاور , Wanjun Wang استاد راهنما
University
Lovisiana State University
Grade
دكتري
Major
Doctor of Philosophy )Ph.D.( )Engineering Science )Interdepartmental Program((
Number of pages
0
Publish Date
2004
Keyword
MEMS , Fracture mechanics , electromagnetic relay , SU-8 , power relay , UV-LIGA
Note
01
Language
انگليسي
Link To Document