Title :
Design and Fabrication of Electromagnetic Micro-Relays Using the UV-LIGA Technique
Author :
Elizabeth J. Podlaha-Murphy استاد مشاور , Marcio S. de Queiroz استاد مشاور , Wanjun Wang استاد راهنما
University :
Lovisiana State University
Major :
Doctor of Philosophy )Ph.D.( )Engineering Science )Interdepartmental Program((
Keyword :
MEMS , Fracture mechanics , electromagnetic relay , SU-8 , power relay , UV-LIGA