Title :
FABRICATION AND EVALUATION OF DEVICES CONTAINING HIGH K GATE DIELECTRICS AND METAL GATE ELECTRODES FOR THE 70 AND 50NM TECHNOLOGY NODES OF ITRS.
Author :
Gerald Lucovsky استاد مشاور , Veena Misra استاد راهنما , Carl Osburn استاد مشاور , Gregory Parsons استاد مشاور
University :
Virginia Polytechnic Institute and state University
Major :
PhD )Electrical Engineering(
Keyword :
Metal Gate , HIGH-K DIELECTRICS , MOSFET DEVICE
