• DocumentCode
    10899
  • Title

    FABRICATION AND EVALUATION OF DEVICES CONTAINING HIGH K GATE DIELECTRICS AND METAL GATE ELECTRODES FOR THE 70 AND 50NM TECHNOLOGY NODES OF ITRS.

  • Author

    Gerald Lucovsky استاد مشاور , Veena Misra استاد راهنما , Carl Osburn استاد مشاور , Gregory Parsons استاد مشاور

  • University
    Virginia Polytechnic Institute and state University
  • Grade
    نامعلوم
  • Major
    PhD )Electrical Engineering(
  • Number of pages
    0
  • Publish Date
    2003
  • Keyword

    Metal Gate , HIGH-K DIELECTRICS , MOSFET DEVICE

  • Note
    01
  • Language
    انگليسي