DocumentCode
10899
Title
FABRICATION AND EVALUATION OF DEVICES CONTAINING HIGH K GATE DIELECTRICS AND METAL GATE ELECTRODES FOR THE 70 AND 50NM TECHNOLOGY NODES OF ITRS.
Author
Gerald Lucovsky استاد مشاور , Veena Misra استاد راهنما , Carl Osburn استاد مشاور , Gregory Parsons استاد مشاور
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
PhD )Electrical Engineering(
Number of pages
0
Publish Date
2003
Keyword
Metal Gate , HIGH-K DIELECTRICS , MOSFET DEVICE
Note
01
Language
انگليسي
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