• DocumentCode
    11075
  • Title

    Wafer bonding of wide bandgap materials

  • Author

    Prater Chrissy E. استاد مشاور , Zlatko Sitar استاد راهنما , Davis استاد مشاور , Nemanich استاد مشاور

  • University
    Virginia Polytechnic Institute and state University
  • Grade
    نامعلوم
  • Major
    PhD )Materials Science and Engineering(
  • Number of pages
    0
  • Publish Date
    2003
  • Keyword

    diamond , silicon carbide , SiC , diamond , SI , fused interface , bonded interface , Interface , fusion bonding , Wafer bonding , Silicon , TEM , Microscopy , electrical measurements , I-V measurements

  • Note
    01
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=17&DC=11075