Title :
Chemically modified Ta2O5 thin films for dynamic random access memory )DRAM( applications
Author :
Carlos T. A. Suchicital استاد مشاور , Pooran. C. Joshi استاد مشاور , Seshu B. Desu استاد راهنما
University :
Virginia Polytechnic Institute and state University
Major :
Master of Science )Materials Science and Engineering(
Keyword :
Thin film , dielectric , tantalum pentoxide , insulating
