DocumentCode :
11860
Title :
Investigation of the Mechanical Behavior of Microbeam-Based MEMS Devices
Author :
Ali H. Nayfeh استاد راهنما
University :
Virginia Polytechnic Institute and state University
Grade :
نامعلوم
Major :
Master of Science )Engineering Science and Mechanics(
Number of pages :
0
Publish Date :
2001
Keyword :
Capacitive Microswitches , Reduced-Order Model , Electrostatic Resonators , MEMS , Pull-in
Note :
01
Language :
انگليسي
Link To Document :
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