12184

LINEARLY TUNABLE RF-MEMS CAPACITORS IMPLEMENTED USING AN INTEGRATED REMOVABLE SELF-MASKING TECHNIQUE

Paul D. Franzon استاد راهنما , Jacqueline Krim استاد مشاور , Gianluca Lazzi استاد مشاور

Virginia Polytechnic Institute and state University

نامعلوم

PhD )Electrical Engineering(

0

2003

SANDIA , Gear , Rotate , varactor , SUMMIT , Removable Mask , RF , Self Masking , Metallization , Tunable Capacitor , MEMS , RF MEMS

01

انگليسي