مرکز منطقه ای اطلاع رساني علوم و فناوري - Real-Time Control of Polysilicon Deposition in Single-Wafer Rapid Thermal Chemical Vapor Deposition Furnaces

DocumentCode :

12604

Title :

Real-Time Control of Polysilicon Deposition in Single-Wafer Rapid Thermal Chemical Vapor Deposition Furnaces

Author :

Kevin M. Lyons استاد مشاور , F. Yates Sorrell استاد راهنما , Dennis E. استاد مشاور

University :

Virginia Polytechnic Institute and state University

Grade :

نامعلوم

Major :

PhD )Mechanical Engineering(

Number of pages :

Publish Date :

1998

Note :

Language :

انگليسي

Link To Document :