• DocumentCode
    12646
  • Title

    INDUCTIVELY COUPLED PLASMA ETCHING OF III-N SEMICONDUCTORS

  • Author

    Robert Nemanich استاد مشاور , Griff Bilbro استاد مشاور , Robert Davis استاد راهنما , Robert Davis استاد مشاور

  • University
    Virginia Polytechnic Institute and state University
  • Grade
    نامعلوم
  • Major
    PhD )Materials Science and Engineering(
  • Number of pages
    0
  • Publish Date
    1999
  • Keyword

    Gallium nitride , GaN , ICP

  • Note
    01
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=17&DC=12646