DocumentCode :
1359
Title :
Fabrication of High Aspect Ratio Vibrating Cylinder Microgyroscope Structures by Use of the LIGA Process
Author :
Michael C. Murphy استاد راهنما , Warren N. Waggenspack Jr. استاد مشاور , Jin-Woo Choi استاد مشاور
University :
Lovisiana State University
Grade :
دكتري
Major :
Doctor of Philosophy )Ph.D.( )Mechanical Engineering(
Number of pages :
0
Publish Date :
2005
Keyword :
Electroplating , LIGA , microgyroscop , MEMS , nickel , Gold , Lithography , mask , X-Ray
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=1359
