Title :
Ultra Deep SU-8 Manufacturing and Characterization for MEMS Applications
Author :
Kevin Kelly استاد راهنما , Jack Helms استاد مشاور , Warren N. Waggenspack Jr. استاد مشاور
University :
Lovisiana State University
Major :
Master of Science in Mechanical Engineering )M.S.M.E.( )Mechanical Engineering(
Keyword :
LIGA , HARMS , Lithography , SU-8 , MEMS
